Could you please check my writing? That if I used proper words. "In the SEMATECH BTU Bruce Horizontal Hot-Wall LPCVD system and similar systems, the gas can be injected in through two different entries (fig X) A) From one end of the furnace B) Perpendicular to the axis of the furnace. In the next, at first it is investigated that which entrance helps more in uniformity of layers. At the next step, by fluctuating pressure and temperature we discover which one has the most effective impact on the uniformity of the layers. Previously, we studied type A, and now the simulation has performed for type B to investigate the differences caused by the changes of the injected gas. In type B, in contrast by type A, the molecules of the gas in the first place have an initial vertical speed vector, and before meeting the first wafer, encounter the opposite side of the furnace. That cause a twist in the flow of the gas, and unlike type A, the flow, tendentiously, does not make its headway to the exhausting outlet. Instead, the flow screws and forcefully is pushed, and finally finds its way out. According to Figure 2 and Figure 8, the disturbance of the temperature in type B has increased, therefore differences between the uniformity of type A and type B can be expected."
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In the SEMATECH BTU Bruce horizontal hot-wall LPCVD system and similar systems, the gas can be injected through one of two different points (fig. X): from one end of the furnace (what I will call "type A"), and perpendicular to the axis of the furnace (type B). In the next, at first it is investigated that which entrance helps more in uniformity of layers.
In the SEMATECH BTU Bruce horizontal hot-wall LPCVD system and similar systems, the gas can be injected through one of two different points (fig. X): from one end of the furnace (what I will call "type A"), and perpendicular to the axis of the furnace (type B). In the next part of the experiment, we test which injection point